发明申请
US20090067034A1 MEMS STRUCTURE AND OPTICAL MODULATOR HAVING TEMPERATURE COMPENSATION LAYER
审中-公开
具有温度补偿层的MEMS结构和光学调制器
- 专利标题: MEMS STRUCTURE AND OPTICAL MODULATOR HAVING TEMPERATURE COMPENSATION LAYER
- 专利标题(中): 具有温度补偿层的MEMS结构和光学调制器
-
申请号: US12060017申请日: 2008-03-31
-
公开(公告)号: US20090067034A1公开(公告)日: 2009-03-12
- 发明人: Ki-Suk Woo , Jong-Hyeong Song , Hee-Yeoun Kim
- 申请人: Ki-Suk Woo , Jong-Hyeong Song , Hee-Yeoun Kim
- 申请人地址: KR Suwon
- 专利权人: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人地址: KR Suwon
- 优先权: KR10-2007-0090975 20070907
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
An optical modulator can be provided that includes a substrate; an insulation layer positioned on the substrate; a ribbon layer such that its center portion is spaced apart from the insulation layer; a piezoelectric actuator positioned on either end of the ribbon layer that provides the driving force which moves the center portion of the ribbon layer vertically; and a temperature compensation layer, which is made of a thermally contracting material having a negative coefficient of expansion, and which is formed on at least one position of an upper portion of the piezoelectric actuator, a lower portion of the piezoelectric actuator, and a lower surface of the ribbon layer corresponding to a position of the piezoelectric actuator. In the optical modulator, the problem of thermal deformation due to rises in temperature can be resolved, whereby the accuracy and reliability of operation of the component can be increased.
信息查询