发明申请
US20090059195A1 EXPOSURE DEVICE WITH MECHANISM FOR FORMING ALIGNMENT MARKS AND EXPOSURE PROCESS CONDUCTED BY THE SAME 有权
具有形成对准标记的机构的接触装置和由其引导的曝光过程

  • 专利标题: EXPOSURE DEVICE WITH MECHANISM FOR FORMING ALIGNMENT MARKS AND EXPOSURE PROCESS CONDUCTED BY THE SAME
  • 专利标题(中): 具有形成对准标记的机构的接触装置和由其引导的曝光过程
  • 申请号: US12187706
    申请日: 2008-08-07
  • 公开(公告)号: US20090059195A1
    公开(公告)日: 2009-03-05
  • 发明人: Jin SatoMasaru Yamaga
  • 申请人: Jin SatoMasaru Yamaga
  • 优先权: JPJP2007-219250 20070827
  • 主分类号: G03B27/42
  • IPC分类号: G03B27/42
EXPOSURE DEVICE WITH MECHANISM FOR FORMING ALIGNMENT MARKS AND EXPOSURE PROCESS CONDUCTED BY THE SAME
摘要:
The present invention relates to an exposure device for transferring circuit patterns of a mask to a roll-film-shaped object. The exposure device includes a supply reel rotation section that is constituted by a supply reel around which the object is wound and that feeds the object by rotating the supply reel, at least one guide roller for guiding the object fed from the supply reel rotation section, an exposure stage on which the circuit patterns are transferred to the object guided by the guide roller, and an alignment mark forming section which forms, on the object, alignment marks that are used to align the mask with the object and which is positioned between the guide roller and the exposure stage.
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