Invention Application
US20090046285A1 Structure for diagnosis system of reaction process 有权
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Structure for diagnosis system of reaction process
Abstract:
The present invention relates to a spectroscopy analyzer for real-time diagnostics of process, and more particularly, to a spectroscopy analyzer for real-time diagnostics of process, in which a beam is injected to a reaction byproduct or a reactant and then an output beam is measured, thereby performing quantitative and qualitative analysis of the reaction byproduct or the reactant.
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