发明申请
- 专利标题: Corrosion barrier layer for photoconductive X-ray imagers
- 专利标题(中): 光导X射线成像仪的腐蚀阻挡层
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申请号: US11731170申请日: 2007-03-29
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公开(公告)号: US20080237481A1公开(公告)日: 2008-10-02
- 发明人: George Zentai , Larry Partain , William Wei-Yu Yao , Richard Weisfield
- 申请人: George Zentai , Larry Partain , William Wei-Yu Yao , Richard Weisfield
- 专利权人: Varian Medical Systems Technologies, Inc.,dpiX, LLC
- 当前专利权人: Varian Medical Systems Technologies, Inc.,dpiX, LLC
- 主分类号: G01T1/24
- IPC分类号: G01T1/24 ; H01L27/146
摘要:
Improved corrosion resistance for direct X-ray imaging detectors is obtained by providing a pixelated, electrically conductive barrier layer between the X-ray sensitive material and the pixel electrodes. Each barrier layer can cover part or all of its corresponding pixel electrode. In cases where pixel electrodes makes contact to underlying circuitry through vertical vias, it is preferred for the barrier layers to cover the via sections of the pixel electrodes. The barrier layers for each pixel electrode can be spaced apart from each other, or they can all be included within a continuous film on top of the pixel electrodes. Such a continuous film can be pixelated by spatially modulating its properties (e.g., thickness, doping) to significantly reduce lateral conductivity from pixel to pixel.
公开/授权文献
- US08232531B2 Corrosion barrier layer for photoconductive X-ray imagers 公开/授权日:2012-07-31
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