Invention Application
- Patent Title: AFM PROBE WITH VARIABLE STIFFNESS
- Patent Title (中): 具有可变刚度的AFM探头
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Application No.: US11962037Application Date: 2007-12-20
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Publication No.: US20080190182A1Publication Date: 2008-08-14
- Inventor: HAK-JOO LEE , SEUNG MIN HYUN , JAE HYUN KIM , JUNG YUP KIM , SEUNG WOO HAN , Jung Min Park , BYUNG IK CHOI
- Applicant: HAK-JOO LEE , SEUNG MIN HYUN , JAE HYUN KIM , JUNG YUP KIM , SEUNG WOO HAN , Jung Min Park , BYUNG IK CHOI
- Applicant Address: KR DAEJEON
- Assignee: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Current Assignee: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Current Assignee Address: KR DAEJEON
- Priority: KR10-2007-0013567 20070209
- Main IPC: G12B21/08
- IPC: G12B21/08

Abstract:
Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.
Public/Granted literature
- US07958566B2 AFM probe with variable stiffness Public/Granted day:2011-06-07
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