Invention Application
US20080190182A1 AFM PROBE WITH VARIABLE STIFFNESS 有权
具有可变刚度的AFM探头

AFM PROBE WITH VARIABLE STIFFNESS
Abstract:
Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.
Public/Granted literature
Information query
Patent Agency Ranking
0/0