Invention Application
US20080132026A1 OPTIMUM PADSET FOR WIRE BONDING RF TECHNOLOGIES WITH HIGH-Q INDUCTORS
失效
用于具有高Q电感器的线束焊接RF技术的最佳焊盘
- Patent Title: OPTIMUM PADSET FOR WIRE BONDING RF TECHNOLOGIES WITH HIGH-Q INDUCTORS
- Patent Title (中): 用于具有高Q电感器的线束焊接RF技术的最佳焊盘
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Application No.: US11551537Application Date: 2006-10-20
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Publication No.: US20080132026A1Publication Date: 2008-06-05
- Inventor: Douglas D. Coolbaugh , Zhong-Xiang He , Wolfgang Sauter , Barbara A. Waterhouse
- Applicant: Douglas D. Coolbaugh , Zhong-Xiang He , Wolfgang Sauter , Barbara A. Waterhouse
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
An RF structure that includes an optimum padset for wire bonding and a high performance inductor that contains relatively thick metal inductor wires, both of which are located atop the final interconnect level of an interconnect structure. Specifically, the RF structure includes a dielectric layer having metal inductor wires of a first thickness and a metal bond pad having a major area of a second thickness located on a surface thereof, wherein the first thickness is greater than the second thickness. In the inventive RF structure, the majority of the metal bond pad is thinned for wire bonding, while maintaining the fill metal wire thickness in the other areas of the structure for inductor performance requirements, such as, for example, low resistivity. Methods for fabricating the aforementioned RF structure are also provided.
Public/Granted literature
- US07754574B2 Optimum padset for wire bonding RF technologies with high-Q inductors Public/Granted day:2010-07-13
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