Invention Application
US20080122052A1 Member for Semiconductor Device and Production Method Thereof 失效
半导体器件及其制作方法

  • Patent Title: Member for Semiconductor Device and Production Method Thereof
  • Patent Title (中): 半导体器件及其制作方法
  • Application No.: US11795251
    Application Date: 2006-01-11
  • Publication No.: US20080122052A1
    Publication Date: 2008-05-29
  • Inventor: Akira Fukui
  • Applicant: Akira Fukui
  • Priority: JP2005-012221 20050120
  • International Application: PCT/JP06/00181 WO 20060111
  • Main IPC: H01L23/14
  • IPC: H01L23/14 C22C1/05 B22F3/14 B22F7/04
Member for Semiconductor Device and Production Method Thereof
Abstract:
A member for a semiconductor device of low price, capable of forming a high quality plating layer on a surface, having heat conductivity at high temperature (100° C.) of more than or equal to 180 W/m·K and toughness that will not cause breaking due to screwing, and will not cause solder breaking due to heat stress when it is bonded to other member with solder, and a production method thereof are provided. A member for a semiconductor device (1) having a coefficient of thermal expansion ranging from 6.5×10−6/K to 15×10−6/K inclusive, and heat conductivity at 100° C. of more than or equal to 180 W/m·K, has: a base material (11) formed of an aluminum-silicon carbide composite material starting from powder material in which particulate silicon carbide is dispersed in aluminum or aluminum alloy, and the content of the silicon carbide is from 30% by mass to 85% by mass inclusive; and a superficial layer (12) containing aluminum or aluminum alloy starting from a melt material bonded on top and bottom faces of the base material (11).
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