发明申请
US20080111244A1 COPPER-METALLIZED INTEGRATED CIRCUITS HAVING AN OVERCOAT FOR PROTECTING BONDABLE METAL CONTACTS AND IMPROVING MOLD COMPOUND ADHESION
审中-公开
具有用于保护金属接触和保护金属化合物粘合剂的过渡金属化的集成电路
- 专利标题: COPPER-METALLIZED INTEGRATED CIRCUITS HAVING AN OVERCOAT FOR PROTECTING BONDABLE METAL CONTACTS AND IMPROVING MOLD COMPOUND ADHESION
- 专利标题(中): 具有用于保护金属接触和保护金属化合物粘合剂的过渡金属化的集成电路
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申请号: US11559966申请日: 2006-11-15
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公开(公告)号: US20080111244A1公开(公告)日: 2008-05-15
- 发明人: Glenn J. Tessmer , Edgardo R. Hortaleza , Thad E. Briggs
- 申请人: Glenn J. Tessmer , Edgardo R. Hortaleza , Thad E. Briggs
- 申请人地址: US TX Dallas
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas
- 主分类号: H01L21/56
- IPC分类号: H01L21/56 ; H01L23/50
摘要:
A semiconductor device having copper interconnecting metallization (111) protected by a first (102) and a second (120) overcoat layer (homogeneous silicon dioxide), portions of the metallization exposed in a window (103) opened through the thicknesses of the first and second overcoat layers. A patterned conductive barrier layer (130) is positioned on the exposed portion of the copper metallization and on portions of the second overcoat layer surrounding the window. A bondable metal layer (150) is positioned on the barrier layer; the thickness of this bondable layer is suitable for wire bonding. A third overcoat layer (160) consist of a homogeneous silicon nitride compound is positioned on the second overcoat layer so that the ledge (162, more than 500 nm high) of the third overcoat layer overlays the edge (150b) of the bondable metal layer. The resulting contoured chip surface improves the adhesion to plastic device encapsulation.
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