发明申请
US20080111244A1 COPPER-METALLIZED INTEGRATED CIRCUITS HAVING AN OVERCOAT FOR PROTECTING BONDABLE METAL CONTACTS AND IMPROVING MOLD COMPOUND ADHESION 审中-公开
具有用于保护金属接触和保护金属化合物粘合剂的过渡金属化的集成电路

COPPER-METALLIZED INTEGRATED CIRCUITS HAVING AN OVERCOAT FOR PROTECTING BONDABLE METAL CONTACTS AND IMPROVING MOLD COMPOUND ADHESION
摘要:
A semiconductor device having copper interconnecting metallization (111) protected by a first (102) and a second (120) overcoat layer (homogeneous silicon dioxide), portions of the metallization exposed in a window (103) opened through the thicknesses of the first and second overcoat layers. A patterned conductive barrier layer (130) is positioned on the exposed portion of the copper metallization and on portions of the second overcoat layer surrounding the window. A bondable metal layer (150) is positioned on the barrier layer; the thickness of this bondable layer is suitable for wire bonding. A third overcoat layer (160) consist of a homogeneous silicon nitride compound is positioned on the second overcoat layer so that the ledge (162, more than 500 nm high) of the third overcoat layer overlays the edge (150b) of the bondable metal layer. The resulting contoured chip surface improves the adhesion to plastic device encapsulation.
信息查询
0/0