发明申请
US20080012074A1 Low Temperature Sol-Gel Silicates As Dielectrics or Planarization Layers For Thin Film Transistors 审中-公开
低温溶胶凝胶硅酸盐作为薄膜晶体管的介质层或平面化层

Low Temperature Sol-Gel Silicates As Dielectrics or Planarization Layers For Thin Film Transistors
摘要:
Traditionally, sol-gel silicates have been reported as being high temperature processable at 400 C to give reasonably dense films that showed good leakage current densities (
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