发明申请
US20080012074A1 Low Temperature Sol-Gel Silicates As Dielectrics or Planarization Layers For Thin Film Transistors
审中-公开
低温溶胶凝胶硅酸盐作为薄膜晶体管的介质层或平面化层
- 专利标题: Low Temperature Sol-Gel Silicates As Dielectrics or Planarization Layers For Thin Film Transistors
- 专利标题(中): 低温溶胶凝胶硅酸盐作为薄膜晶体管的介质层或平面化层
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申请号: US11773570申请日: 2007-07-05
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公开(公告)号: US20080012074A1公开(公告)日: 2008-01-17
- 发明人: Thomas Braymer , Christine Kretz , Thomas Markley , Scott Weigel
- 申请人: Thomas Braymer , Christine Kretz , Thomas Markley , Scott Weigel
- 申请人地址: US PA Allentown 18195-1501
- 专利权人: AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人: AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人地址: US PA Allentown 18195-1501
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; C09D183/06
摘要:
Traditionally, sol-gel silicates have been reported as being high temperature processable at 400 C to give reasonably dense films that showed good leakage current densities (
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