发明申请
US20070299176A1 Photodefinable low dielectric constant material and method for making and using same 审中-公开
可光缩合的低介电常数材料及其制造和使用方法

Photodefinable low dielectric constant material and method for making and using same
摘要:
A photodefinable, organosilicate material having a dielectric constant (κ) of 3.5 or below and a method for making and using same, for example, in an electronic device, is described herein. In one aspect, there is provided a composition for preparing a photodefinable material comprising: a silica source capable of being sol-gel processed and having a molar ratio of carbon to silicon within the silica source contained therein of at least 0.5 or greater; a photoactive compound; optionally a solvent; and water provided the composition contains 0.1% by weight or less of an added acid where the acid has a molecular weight of 500 or less.
信息查询
0/0