发明申请
US20070299176A1 Photodefinable low dielectric constant material and method for making and using same
审中-公开
可光缩合的低介电常数材料及其制造和使用方法
- 专利标题: Photodefinable low dielectric constant material and method for making and using same
- 专利标题(中): 可光缩合的低介电常数材料及其制造和使用方法
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申请号: US11341334申请日: 2006-01-27
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公开(公告)号: US20070299176A1公开(公告)日: 2007-12-27
- 发明人: Thomas Markley , Scott Weigel , Christine Kretz , Thomas Braymer , James Mac Dougall , Cecilia Petit
- 申请人: Thomas Markley , Scott Weigel , Christine Kretz , Thomas Braymer , James Mac Dougall , Cecilia Petit
- 主分类号: B05D3/02
- IPC分类号: B05D3/02 ; B05D3/06 ; B60C1/00 ; C08L83/04
摘要:
A photodefinable, organosilicate material having a dielectric constant (κ) of 3.5 or below and a method for making and using same, for example, in an electronic device, is described herein. In one aspect, there is provided a composition for preparing a photodefinable material comprising: a silica source capable of being sol-gel processed and having a molar ratio of carbon to silicon within the silica source contained therein of at least 0.5 or greater; a photoactive compound; optionally a solvent; and water provided the composition contains 0.1% by weight or less of an added acid where the acid has a molecular weight of 500 or less.
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