Invention Application
US20070262373A1 Non-volatile memory integrated circuit device and method of fabricating the same
审中-公开
非易失性存储器集成电路器件及其制造方法
- Patent Title: Non-volatile memory integrated circuit device and method of fabricating the same
- Patent Title (中): 非易失性存储器集成电路器件及其制造方法
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Application No.: US11800650Application Date: 2007-05-07
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Publication No.: US20070262373A1Publication Date: 2007-11-15
- Inventor: Weon-ho Park , Jeong-uk Han , Yong-tae Kim , Tea-kwang Yu , Kwang-tae Kim , Ji-hoon Park
- Applicant: Weon-ho Park , Jeong-uk Han , Yong-tae Kim , Tea-kwang Yu , Kwang-tae Kim , Ji-hoon Park
- Assignee: Samsung Electronics, Co., Ltd.
- Current Assignee: Samsung Electronics, Co., Ltd.
- Priority: KR10-2006-0042571 20060511
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
A non-volatile memory integrated circuit device and a method of fabricating the same are disclosed. The non-volatile memory integrated circuit device includes a semiconductor substrate, a tunneling dielectric layer, a memory gate and a select gate, a floating junction region, a bit line junction region and a common source region, and a tunneling-prevention dielectric layer pattern. The tunneling dielectric layer is formed on the semiconductor substrate. The memory gate and a select gate are formed on the tunneling dielectric layer to be spaced apart from each other. The floating junction region is formed within the semiconductor substrate between the memory gate and the select gate, the bit line junction region is formed opposite the floating junction region with respect to the memory gate, and a common source region is formed opposite the floating junction region with respect to the select gate. The tunneling-prevention dielectric layer pattern is interposed between the semiconductor substrate and the tunneling dielectric layer, and is configured to overlap part of the memory gate.
Information query
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