- 专利标题: Ion sources, systems and methods
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申请号: US11599954申请日: 2006-11-15
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公开(公告)号: US20070158581A1公开(公告)日: 2007-07-12
- 发明人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill
- 申请人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill
- 主分类号: H01J27/00
- IPC分类号: H01J27/00
摘要:
Ion sources, systems and methods are disclosed.
公开/授权文献
- US07557358B2 Ion sources, systems and methods 公开/授权日:2009-07-07
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