Invention Application
- Patent Title: Thermoelastically actuated microresonator
- Patent Title (中): 热弹性微谐振器
-
Application No.: US10556033Application Date: 2004-05-09
-
Publication No.: US20070063613A1Publication Date: 2007-03-22
- Inventor: David Elata , Rashed Mahameed
- Applicant: David Elata , Rashed Mahameed
- Applicant Address: IL HAIFA 32000
- Assignee: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD.
- Current Assignee: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD.
- Current Assignee Address: IL HAIFA 32000
- International Application: PCT/IL04/00391 WO 20040509
- Main IPC: H02N10/00
- IPC: H02N10/00
Abstract:
A thermoelastically actuated microresonator device comprising: a main body (14) having a cantilevered beam (12); a heating element (20) located adjacent a surface of the cantilevered beam and adjacent the main body, that may be periodically actuated to generate a periodic heat gradient across a height of the beam, thereby facilitating periodic deflection of the beam.
Information query
