Invention Application
US20070058159A1 Method of and apparatus for determining focus of an imaging system
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用于确定成像系统的焦点的方法和装置
- Patent Title: Method of and apparatus for determining focus of an imaging system
- Patent Title (中): 用于确定成像系统的焦点的方法和装置
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Application No.: US10578652Application Date: 2004-11-02
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Publication No.: US20070058159A1Publication Date: 2007-03-15
- Inventor: Peter Greve , Albert Bijlsma , Willem Rosier
- Applicant: Peter Greve , Albert Bijlsma , Willem Rosier
- Applicant Address: NL Eindhoven
- Assignee: KONINKLIJKE PHILIPS ELECTRONICS N.V.
- Current Assignee: KONINKLIJKE PHILIPS ELECTRONICS N.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP03104195.7 20031114
- International Application: PCT/IB04/52262 WO 20041102
- Main IPC: G01J1/00
- IPC: G01J1/00

Abstract:
The focus of an optical system (20) can be determined in a reliable and accurate way by arranging a first and second test object (62,64) having a periodic structure at different sides of the focal plane (66) of the optical system and determining the difference in modulation depth of the images formed on different areas (32,34) of a radiation-sensitive detection system (30).
Public/Granted literature
- US07453581B2 Method of and apparatus for determining focus of an imaging system Public/Granted day:2008-11-18
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