Invention Application
US20070058159A1 Method of and apparatus for determining focus of an imaging system 失效
用于确定成像系统的焦点的方法和装置

Method of and apparatus for determining focus of an imaging system
Abstract:
The focus of an optical system (20) can be determined in a reliable and accurate way by arranging a first and second test object (62,64) having a periodic structure at different sides of the focal plane (66) of the optical system and determining the difference in modulation depth of the images formed on different areas (32,34) of a radiation-sensitive detection system (30).
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