发明申请
- 专利标题： Optical sensor element and sensor array
- 专利标题（中）： 光传感器元件和传感器阵列
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申请号： US10560498申请日： 2004-06-09
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公开(公告)号： US20060284275A1公开(公告)日： 2006-12-21
- 发明人: Peter Deimel , Ulrich Prechtel
- 申请人： Peter Deimel , Ulrich Prechtel
- 优先权： DE10326640.2 20030611
- 国际申请： PCT/EP04/06247 WO 20040609
- 主分类号： H01L31/0232
- IPC分类号： H01L31/0232
摘要：
The invention relates to an optical sensor element (10) which comprises, in a semiconductor substrate (1), a light-sensitive region (18) in which charge carriers can be released by irradiation, and two doped regions (15, 16) for receiving the charge carriers released in the light-sensitive region (18). The invention is characterized in that electrodes (13, 14) for generating a field gradient in the light-sensitive region (18) are insulated from the light-sensitive region (18) and are disposed in trenches formed in the surface of the substrate (1).
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