Invention Application
- Patent Title: Quartz crystal microbalance humidity sensor
- Patent Title (中): 石英晶体微量天平湿度传感器
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Application No.: US10558148Application Date: 2004-05-17
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Publication No.: US20060260385A1Publication Date: 2006-11-23
- Inventor: Ehud Galun , Galit Zilberman , Vladimir Tsionsky , Eliezer Gileadi
- Applicant: Ehud Galun , Galit Zilberman , Vladimir Tsionsky , Eliezer Gileadi
- Applicant Address: IL REHOVOT IL TELAVIV
- Assignee: ELOP ELECTRO-OPTICS INDUSTRIES LTD,RAMOT AT TEL AVIV UNIVERSITY LTD
- Current Assignee: ELOP ELECTRO-OPTICS INDUSTRIES LTD,RAMOT AT TEL AVIV UNIVERSITY LTD
- Current Assignee Address: IL REHOVOT IL TELAVIV
- International Application: PCT/IL04/00418 WO 20040517
- Main IPC: G01N29/02
- IPC: G01N29/02 ; C25D1/00
Abstract:
A humidity sensor and a quartz crystal microbalance (QCM) therefor, for measuring low humidity levels, and a method for preparing same. The metallic surface of the QCM is electroplated with a hygroscopic layer. The hygroscopic layer preferably includes Manganese. A salt is formed on the hygroscopic layer. The salt is preferably salt of Manganese, and most preferably Manganese Chloride (MnCl2).
Public/Granted literature
- US07461539B2 Quartz crystal microbalance humidity sensor Public/Granted day:2008-12-09
Information query
