发明申请
US20060258025A1 Fabrication method of IC inlet, ID tag, ID tag reader and method of reading date thereof
审中-公开
IC入口，ID标签，ID标签阅读器的制作方法及其阅读日期的方法
- 专利标题： Fabrication method of IC inlet, ID tag, ID tag reader and method of reading date thereof
- 专利标题（中）： IC入口，ID标签，ID标签阅读器的制作方法及其阅读日期的方法
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申请号： US11491275申请日： 2006-07-24
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公开(公告)号： US20060258025A1公开(公告)日： 2006-11-16
- 发明人: Michio Okamoto , Hisao Yamagata , Nobuo Murakami , Keizo Kakitani , Hidehiro Fujiwara , Takeshi Saitou
- 申请人： Michio Okamoto , Hisao Yamagata , Nobuo Murakami , Keizo Kakitani , Hidehiro Fujiwara , Takeshi Saitou
- 优先权： JP2003-004099 20030110
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; G01R23/16 ; G01S3/02 ; G01V3/00
摘要：
A method accurately inspects whether an IC inlet to be inspected is non-defective or defective in a state in which a large number of IC inlets are formed over an insulating film. The inspection of IC inlets formed over an insulating film is performed by transmitting microwaves to the IC inlets from antennas. To selectively irradiate the microwaves to only one IC inlet to be inspected out of a large number of IC inlets that are formed over the insulating film, a radio-wave absorbing plate is inserted between the insulating film and the antennas, and the microwaves are irradiated to the IC inlet through a slit formed in the radio-wave absorbing plate. The radio-wave absorbing plate is configured such that the slit, which is substantially equal to the IC inlet in size, is formed in a portion of a planar plate that is formed of a radio-wave absorber.
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