- 专利标题: Compositions for preparing low dielectric materials
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申请号: US11484049申请日: 2006-07-11
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公开(公告)号: US20060249713A1公开(公告)日: 2006-11-09
- 发明人: Brian Peterson , John Kirner , Scott Weigel , James MacDougall , Thomas Deis , Lisa Deis , Thomas Braymer , Keith Campbell , Martin Devenney , C. Ramberg , Konstantinos Chondroudis , Keith Cendak
- 申请人: Brian Peterson , John Kirner , Scott Weigel , James MacDougall , Thomas Deis , Lisa Deis , Thomas Braymer , Keith Campbell , Martin Devenney , C. Ramberg , Konstantinos Chondroudis , Keith Cendak
- 主分类号: H01B1/12
- IPC分类号: H01B1/12
摘要:
Low dielectric materials and films comprising same have been identified for improved performance when used as performance materials, for example, in interlevel dielectrics integrated circuits as well as methods for making same. In one aspect of the present invention, the performance of the dielectric material may be improved by controlling the weight percentage of ethylene oxide groups in the at least one porogen.
公开/授权文献
- US07294585B2 Compositions for preparing low dielectric materials 公开/授权日:2007-11-13
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