发明申请
US20060191294A1 Synthetic silica glass tube for the production of a preform, method for producing the same in a vertical drawing process and use of said tube
审中-公开
用于生产预成型件的合成石英玻璃管,用于在垂直拉伸工艺中制造其的方法和所述管的使用
- 专利标题: Synthetic silica glass tube for the production of a preform, method for producing the same in a vertical drawing process and use of said tube
- 专利标题(中): 用于生产预成型件的合成石英玻璃管,用于在垂直拉伸工艺中制造其的方法和所述管的使用
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申请号: US10550049申请日: 2004-03-19
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公开(公告)号: US20060191294A1公开(公告)日: 2006-08-31
- 发明人: Oliver Ganz , Ralph Sattmann , Jan Vydra
- 申请人: Oliver Ganz , Ralph Sattmann , Jan Vydra
- 申请人地址: DE Hanau
- 专利权人: HERAEUS TENEVO GmbH
- 当前专利权人: HERAEUS TENEVO GmbH
- 当前专利权人地址: DE Hanau
- 优先权: DE10312760.7 20030321; DE10312543.4 20030322
- 国际申请: PCT/EP04/02882 WO 20040319
- 主分类号: C03B37/025
- IPC分类号: C03B37/025 ; C03B37/02
摘要:
Known synthetic quartz glass tubes for the production of a preform have an inner bore with a surface layer produced without using tools in the molten state and an inner zone. The aim of the invention is to provide a tube which does not release any OH groups to the surroundings. For this purpose, the surface layer (30) has a thickness of 10 μm and an average OH content of not more than 5 ppm by weight and an average surface roughness Ra of not more than 0.1 μm. The inner zone (34) that starts on the surface layer (30) and terminates 10 μm before the outer wall has an average OH content of not more than 0.2 ppm by weight. A simple and inexpensive method for producing a quartz tube of the above type is to continuously draw a tube strand from a softened quartz glass mass in a vertical drawing process. A scavenging gas is circulated through the inner bore of the tube, said gas having a water content of less than 100 ppb per weight. The front end of the tube strand (19) is closed by a flow obstacle (26) that is permeable the scavenging gas and that reduces the amount of scavenging gas (23) flowing through.
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