Invention Application
- Patent Title: Method of manufacturing micromirror array and method of manufacturing optical device having micromirror
- Patent Title (中): 制造微镜阵列的方法和制造具有微镜的光学装置的方法
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Application No.: US11353964Application Date: 2006-02-15
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Publication No.: US20060181762A1Publication Date: 2006-08-17
- Inventor: Yun-woo Nam , Hoo-san Lee
- Applicant: Yun-woo Nam , Hoo-san Lee
- Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Priority: KR10-2005-0012425 20050215
- Main IPC: G02B26/00
- IPC: G02B26/00

Abstract:
A method of manufacturing a micromirror array and a method of manufacturing an optical device having a micromirror. The method of manufacturing a micromirror array includes forming an adhesion layer on a substrate and a magnetic layer on the adhesion layer, patterning the adhesion layer and magnetic layer, magnetizing the magnetic layer and forming a bonding layer on each side of the adhesion layer and the magnetic layer. The substrate is severed into units, each unit including the adhesion layer, the magnetic layer, and the bonding layer. A mirror surface is formed on a side of the substrate to form a unit micromirror structure. The unit micromirror structure is then placed in a holder to form a micromirror array.
Public/Granted literature
- US07372618B2 Method of manufacturing micromirror array and method of manufacturing optical device having micromirror Public/Granted day:2008-05-13
Information query