发明申请
US20060113719A1 Non-contact transport apparatus 审中-公开
非接触式输送装置

Non-contact transport apparatus
摘要:
A non-contact transport apparatus comprises a top plate, which is formed with an air supply hole, an under plate, which is formed with a plurality of air-jetting holes, and a plurality of intermediate plates, which are stacked and interposed between the top plate and the under plate. The intermediate plates are formed with slits therein functioning as nozzles and fluid passages that communicate with the air supply hole and the air-jetting holes. Screw members are provided, which integrally connect the top plate, the plurality of intermediate plates, and the under plate.
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