发明申请
- 专利标题: Solid state image pickup device and method for manufacturing the same
- 专利标题(中): 固体摄像装置及其制造方法
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申请号: US11208959申请日: 2005-08-22
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公开(公告)号: US20060060854A1公开(公告)日: 2006-03-23
- 发明人: Toshifumi Wakano , Keiji Mabuchi , Takashi Nakashikiryo , Kazunari Matsubayashi
- 申请人: Toshifumi Wakano , Keiji Mabuchi , Takashi Nakashikiryo , Kazunari Matsubayashi
- 优先权: JPP2004-252262 20040831
- 主分类号: H01L29/04
- IPC分类号: H01L29/04
摘要:
To reduce white spots by optimizing an impurity concentration of a p-type impurity doped region of a well contact, a size of a contact portion, a position of an n-type region serving as a photoelectric converter, and so on. In a solid state image pickup device in which a semiconductor substrate 11 includes a pixel region where a plurality of pixels are arranged, each pixel including a photoelectric converter 21, and a pixel well 12 shared by the respective pixels, a well contact 14 supplying a reference voltage to the pixel well 12 includes: an electrode 15 supplying a reference voltage; a p-type impurity doped region 16 placed in a surface of the pixel well 12; and a contact portion 17 placed in the p-type impurity doped region 16 so as to be connected to the electrode 15 and having a higher concentration than the p-type impurity doped region 16. The p-type impurity doped region 16 is doped with at least a p-type impurity, with an impurity concentration of 1×1019 cm−3 or less.
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