Invention Application
US20050264866A1 Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display apparatus including optical modulator
有权
光调制器，光调制器制造方法，包括光调制器的光信息处理装置，包括光调制器的图像形成装置，以及包括光调制器的图像投影和显示装置
- Patent Title: Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display apparatus including optical modulator
- Patent Title (中): 光调制器，光调制器制造方法，包括光调制器的光信息处理装置，包括光调制器的图像形成装置，以及包括光调制器的图像投影和显示装置
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Application No.: US11195695Application Date: 2005-08-03
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Publication No.: US20050264866A1Publication Date: 2005-12-01
- Inventor: Kouichi Ohtaka , Seiichi Katoh , Takeshi Nanjyo , Masanori Horike , Eiichi Ohta
- Applicant: Kouichi Ohtaka , Seiichi Katoh , Takeshi Nanjyo , Masanori Horike , Eiichi Ohta
- Priority: JP2001-010870 20010118; JP2001-070303 20010313; JP2001-077614 20010319; JP2001-097590 20010329; JP2001-133709 20010427
- Main IPC: G02B26/02
- IPC: G02B26/02 ; G02B26/00 ; G02B6/04
Abstract:
A center beam which is formed out of a thin film constituted to be combined with a light reflection film provided on one surface of the center beam, which has both ends fixed and which is deformed by an electronic force; a substrate electrode which is opposed to the center beam through a gap formed on the other surface of the center beam; an opposed surface which is a surface of the substrate electrode opposed to the center beam modulating the incident light on the light reflection film, the opposed surface restricting deformation of the center beam due to application of a driving voltage to the substrate electrode by abutting on the center beam; and a substrate which has the substrate electrode having the opposed surface, formed in a concave section, and which holds a to-be-held section of the center beam, are provided. As a result, the structure of modulating light by changing the reflection direction of the incident light is simple, response is fast, the wavelength of the incident light to be used is not limited, operation is stable, reliability is high, the number of manufacturing steps is small and cost reduction can be achieved.
Public/Granted literature
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