发明申请
US20050202585A1 MICRO-MACHINED ELECTROMECHANICAL SYSTEM (MEMS) ACCELEROMETER DEVICE HAVING ARCUATELY SHAPED FLEXURES
失效
微机电系统（MEMS）加速度计装置，具有精确形状的灵活性
- 专利标题： MICRO-MACHINED ELECTROMECHANICAL SYSTEM (MEMS) ACCELEROMETER DEVICE HAVING ARCUATELY SHAPED FLEXURES
- 专利标题（中）： 微机电系统（MEMS）加速度计装置，具有精确形状的灵活性
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申请号： US11000652申请日： 2004-11-30
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公开(公告)号： US20050202585A1公开(公告)日： 2005-09-15
- 发明人: Mark Eskridge
- 申请人： Mark Eskridge
- 申请人地址： US NJ Morristown
- 专利权人： Honeywell International, Inc.
- 当前专利权人： Honeywell International, Inc.
- 当前专利权人地址： US NJ Morristown
- 主分类号： B81B3/00
- IPC分类号： B81B3/00 ; G01P15/08 ; G01P15/097 ; G01P15/10 ; G01P15/125 ; H01L21/00 ; G01P15/00
摘要：
A method for suspending a movable structure form a support structure wherein first and second flat and thin arcuately shaped flexures are formed having spaced apart substantially planar and parallel opposing surfaces, each of the first and second flexures being structured for connection between a support structure and a movable structure to be suspended from the support structure and being aligned along a common axis of rotation between the support structure and the movable structure.
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