Invention Application
US20050089593A1 Molding apparatus with a pressure sensor for packaging semiconductor device 审中-公开
具有用于封装半导体器件的压力传感器的成型装置

Molding apparatus with a pressure sensor for packaging semiconductor device
Abstract:
A molding apparatus mainly comprises a mold chase holder, a mold chase, a heater and a pressure sensor. The mold chase comprises a mold cavity and a via, wherein the via penetrates the mold-cavity surface of the mold cavity. The mold chase is accommodated by a mold chase holder and there is a heater, for heating the mold chase up, disposed therein. And the pressure sensor for measuring the viscosity of the instant molding flow at the mold-cavity surface of the mold cavity is provided in the via of the mold chase.
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