发明申请
US20050072054A1 Chemical-mechanical polishing (CMP) slurry and method of planarizing computer memory disk surfaces
审中-公开
化学机械抛光(CMP)浆料和平面化计算机存储盘表面的方法
- 专利标题: Chemical-mechanical polishing (CMP) slurry and method of planarizing computer memory disk surfaces
- 专利标题(中): 化学机械抛光(CMP)浆料和平面化计算机存储盘表面的方法
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申请号: US10713709申请日: 2003-11-14
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公开(公告)号: US20050072054A1公开(公告)日: 2005-04-07
- 发明人: Mingming Fang , Michael Ianiro , Don Eisenhour
- 申请人: Mingming Fang , Michael Ianiro , Don Eisenhour
- 申请人地址: US IL Arlington Heights
- 专利权人: AMCOL INTERNATIONAL CORPORATION, a Delaware corporation
- 当前专利权人: AMCOL INTERNATIONAL CORPORATION, a Delaware corporation
- 当前专利权人地址: US IL Arlington Heights
- 主分类号: C09G1/02
- IPC分类号: C09G1/02 ; C09K3/14 ; H01L21/321 ; B24D3/02
摘要:
Compositions and methods for planarizing or polishing a NiP, glass, ceramic or Glass-ceramic surface in the manufacture of a computer memory disk. The polishing compositions described herein comprise (a) a liquid carrier, preferably water; (b) an abrasive; (c) purified clay; and optional additives, such as (d) a chemical accelerator or oxidizing agent; and (e) a complexing or coupling agent capable of chemically or ionically complexing with, or coupling to, the NiP, glass, ceramic, and/or glass-ceramic material removed during the polishing process. The complexing or coupling agent carries away the metal, glass, ceramic and/or glass-ceramic particles removed during polishing, to prevent the separated particles from returning to the surface from which they were removed. Also disclosed are methods of planarizing or polishing a NiP, glass, ceramic and/or glass-ceramic surface comprising contacting the surface with the compositions.
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