发明申请
US20050057735A1 Reduction Smith-Talbot interferometer prism for micropatterning
有权
用于微图案的Smith-Talbot干涉仪棱镜
- 专利标题: Reduction Smith-Talbot interferometer prism for micropatterning
- 专利标题(中): 用于微图案的Smith-Talbot干涉仪棱镜
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申请号: US10898677申请日: 2004-07-23
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公开(公告)号: US20050057735A1公开(公告)日: 2005-03-17
- 发明人: Bruce Smith
- 申请人: Bruce Smith
- 主分类号: G03B27/52
- IPC分类号: G03B27/52 ; G03F7/20 ; G06T20060101
摘要:
Reduction Talbot interference imaging is carried out using a glass or fused silica prism, where at least two surfaces within the prism allow for an increase in the propagating ray angles at the image plane compared to the object (the photomask) plane. Furthermore, by adding a second orthogonal pair of surfaces, X and Y order recombination is made possible thus allowing for the imaging in an orthogonal direction with a two-order interference scheme as well as repeating checkerboard (island and hole) patterns with a four-order interference scheme. A benefit of the invention is the reduced requirements of the photo mask, allowing for diffraction limited imaging with UV wavelengths in a media with index of unity (air) or larger (an immersion fluid). The prism interferometer is known as a Smith-Talbot prism lens.
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