Invention Application
- Patent Title: Method for manufacturing metal microstructure
- Patent Title (中): 制造金属微观结构的方法
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Application No.: US10492918Application Date: 2004-04-16
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Publication No.: US20040248421A1Publication Date: 2004-12-09
- Inventor: Jun Yorita , Yoshihiro Hirata , Tsuyoshi Haga
- Priority: JP2001-330652 20011029; JP2002-295077 20021008
- Main IPC: H01L021/302
- IPC: H01L021/302 ; H01L021/461

Abstract:
A method of manufacturing a metal microstructure by using a resin mold. In order to provide a method in which a mild manufacturing condition which causes less damage to the resin mold can be set and the high-precision metal microstructure can be mass-produced by uniform electroforming, the method of manufacturing the metal microstructure according to the present invention includes the steps of: fixing on a conductive substrate the resin mold having a vacant portion penetrating in the direction of thickness, by interposing a photosensitive polymer having a chemical composition changed by an electron beam, ultraviolet radiation or visible radiation so as to form a layered structure having the resin mold; exposing the layered structure having the resin mold to an electron beam, ultraviolet radiation or visible radiation; removing an exposed photosensitive polymer existing at the vacant portion of the resin mold; and filling with a metal the vacant portion of the layered structure having the resin mold by electroforming.
Public/Granted literature
- US07105281B2 Method for manufacturing metal microstructure Public/Granted day:2006-09-12
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