Invention Application
US20040248421A1 Method for manufacturing metal microstructure 失效
制造金属微观结构的方法

  • Patent Title: Method for manufacturing metal microstructure
  • Patent Title (中): 制造金属微观结构的方法
  • Application No.: US10492918
    Application Date: 2004-04-16
  • Publication No.: US20040248421A1
    Publication Date: 2004-12-09
  • Inventor: Jun YoritaYoshihiro HirataTsuyoshi Haga
  • Priority: JP2001-330652 20011029; JP2002-295077 20021008
  • Main IPC: H01L021/302
  • IPC: H01L021/302 H01L021/461
Method for manufacturing metal microstructure
Abstract:
A method of manufacturing a metal microstructure by using a resin mold. In order to provide a method in which a mild manufacturing condition which causes less damage to the resin mold can be set and the high-precision metal microstructure can be mass-produced by uniform electroforming, the method of manufacturing the metal microstructure according to the present invention includes the steps of: fixing on a conductive substrate the resin mold having a vacant portion penetrating in the direction of thickness, by interposing a photosensitive polymer having a chemical composition changed by an electron beam, ultraviolet radiation or visible radiation so as to form a layered structure having the resin mold; exposing the layered structure having the resin mold to an electron beam, ultraviolet radiation or visible radiation; removing an exposed photosensitive polymer existing at the vacant portion of the resin mold; and filling with a metal the vacant portion of the layered structure having the resin mold by electroforming.
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