发明申请
US20040026234A1 Method and device for continuous cold plasma deposition of metal coatings
有权
金属涂层连续冷等离子体沉积的方法和装置
- 专利标题: Method and device for continuous cold plasma deposition of metal coatings
- 专利标题(中): 金属涂层连续冷等离子体沉积的方法和装置
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申请号: US10362585申请日: 2003-08-18
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公开(公告)号: US20040026234A1公开(公告)日: 2004-02-12
- 发明人: Pierre Vanden Brande , Alain Weymeersch
- 优先权: EP00202942.9 20000823
- 主分类号: C23C014/32
- IPC分类号: C23C014/32
摘要:
A method for the deposition of a metal layer on a substrate (1) uses a cold plasma inside an enclosure (7) heated to avoid the formation of a metal deposit at its surface. The enclosure has an inlet (21) and an outlet (22) for the substrate with a source of metal vapor between them, made up of an electrode to form a plasma (6) with the substrate or a separate electrically conducting element as a counter-electrode. The deposition metal is introduced in the liquid state in a retention tank (8) and is maintained as a liquid at an essentially constant level during the formation of the metal layer on the substrate. An Independent claim is included for the device used to put this method of coating a substrate into service.
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