Invention Application
US20020127812A1 Probe pin for testing electrical characteristics of apparatus, probe card using probe pins
失效
用于测试设备的电气特性的探头针,使用探针的探针卡
- Patent Title: Probe pin for testing electrical characteristics of apparatus, probe card using probe pins
- Patent Title (中): 用于测试设备的电气特性的探头针,使用探针的探针卡
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Application No.: US09733228Application Date: 2000-12-08
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Publication No.: US20020127812A1Publication Date: 2002-09-12
- Inventor: Noriaki Matsunaga , Hideki Shibata , Nobuo Hayasaka
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: null
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: null
- Priority: JPP11-363317 19991221
- Main IPC: H01L021/336
- IPC: H01L021/336

Abstract:
A probe pin for testing electric characteristics of a semiconductor device comprises a silicon pin core (3, 23, 33), and a conductive film (4, 24, 34) covering the entire surface, including the bottom face, of the pin core. The bottom face of the probe pin is connected directly to an electrode (7, 37) positioned in or on a print wiring board. A number of probe pins can be connected to the associated electrodes at a high density, thereby forming a fine-pitch probe card having a superior high-frequency signal characteristic.
Public/Granted literature
- US06724208B2 Probe pin for testing electrical characteristics of apparatus, probe card using probe pins Public/Granted day:2004-04-20
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