Invention Application
US20020127812A1 Probe pin for testing electrical characteristics of apparatus, probe card using probe pins 失效
用于测试设备的电气特性的探头针,使用探针的探针卡

Probe pin for testing electrical characteristics of apparatus, probe card using probe pins
Abstract:
A probe pin for testing electric characteristics of a semiconductor device comprises a silicon pin core (3, 23, 33), and a conductive film (4, 24, 34) covering the entire surface, including the bottom face, of the pin core. The bottom face of the probe pin is connected directly to an electrode (7, 37) positioned in or on a print wiring board. A number of probe pins can be connected to the associated electrodes at a high density, thereby forming a fine-pitch probe card having a superior high-frequency signal characteristic.
Information query
Patent Agency Ranking
0/0