发明申请
- 专利标题： PROCESS FOR PURIFYING PERFLUORINATED PRODUCTS
- 专利标题（中）： 净化全氟化合物的工艺
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申请号： US09189322申请日： 1998-11-09
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公开(公告)号： US20020001560A1公开(公告)日： 2002-01-03
- 发明人: RALPH NEWTON MILLER , BARRY ASHER MAHLER , CHIEN-PING CHAI KAO
- 主分类号： B01D003/34
- IPC分类号： B01D003/34
摘要：
Nitrogen trifluoride (NF3) containing less than 10 parts-per-million molar impurities, e.g., tetrafluoromethane (PFC-14), is disclosed. Azeotropic and extractive distillation processes using entraining agents for separating NF3 and PFC-14 from each other and from mixtures with other electronics industry materials are disclosed.
公开/授权文献
- US06458249B2 Process for purifying perfluorinated products 公开/授权日：2002-10-01
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