Invention Application
US20010055688A1 Electrode material for forming stamper and thin film for forming stamper
失效
用于成型压模的电极材料和用于成型压模的薄膜
- Patent Title: Electrode material for forming stamper and thin film for forming stamper
- Patent Title (中): 用于成型压模的电极材料和用于成型压模的薄膜
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Application No.: US09853677Application Date: 2001-05-14
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Publication No.: US20010055688A1Publication Date: 2001-12-27
- Inventor: Masahiro Katsumura , Tetsuya Iida , Takashi Ueno
- Applicant: PIONEER CORPORATION
- Applicant Address: null
- Assignee: PIONEER CORPORATION
- Current Assignee: PIONEER CORPORATION
- Current Assignee Address: null
- Priority: JPP2000-139384 20000512
- Main IPC: B32B015/04
- IPC: B32B015/04

Abstract:
To present a material for stamper free from deterioration of stamper quality due to reaction with an electron-attracting radical contained in the resist material. An electrode formed on the surface of a patterned resist film 2 for electrocasting a stamper material is formed of a nickel alloy thin film 3 comprising Ni element as a principal component, and Ru element added in a range of less than 25 percent by weight.
Public/Granted literature
- US06344275B2 Electrode material for forming stamper and thin film for forming stamper Public/Granted day:2002-02-05
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