Invention Application
US20010055688A1 Electrode material for forming stamper and thin film for forming stamper 失效
用于成型压模的电极材料和用于成型压模的薄膜

Electrode material for forming stamper and thin film for forming stamper
Abstract:
To present a material for stamper free from deterioration of stamper quality due to reaction with an electron-attracting radical contained in the resist material. An electrode formed on the surface of a patterned resist film 2 for electrocasting a stamper material is formed of a nickel alloy thin film 3 comprising Ni element as a principal component, and Ru element added in a range of less than 25 percent by weight.
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