Invention Grant
- Patent Title: Electronic devices comprising a compressive dielectric material, and related systems and methods
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Application No.: US17664385Application Date: 2022-05-20
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Publication No.: US12205900B2Publication Date: 2025-01-21
- Inventor: Jivaan Kishore Jhothiraman , Rutuparna Narulkar , Chandra S. Tiwari
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/768 ; H01L21/02 ; H10B69/00

Abstract:
An electronic device includes a stack structure, the stack structure including at least one deck including tiers of vertically alternating dielectric materials and conductive materials, an opening extending through the at least one deck, a compressive dielectric material disposed on a bottom surface defining the opening and on sidewalls of the tiers defining the opening, and a dielectric material in direct contact with the compressive dielectric material. The dielectric material substantially fills a remainder of the opening. The compressive dielectric material exhibits a horizontal compressive force against the tiers. Related methods and systems are also disclosed.
Public/Granted literature
- US20230378069A1 ELECTRONIC DEVICES COMPRISING A COMPRESSIVE DIELECTRIC MATERIAL, AND RELATED SYSTEMS AND METHODS Public/Granted day:2023-11-23
Information query
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