- 专利标题： Annealing device and annealing method
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申请号： US17336932申请日： 2021-06-02
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公开(公告)号： US12106983B2公开(公告)日： 2024-10-01
- 发明人: Teppei Tanaka
- 申请人： SUMITOMO HEAVY INDUSTRIES, LTD.
- 申请人地址： JP Tokyo
- 专利权人： SUMITOMO HEAVY INDUSTRIES, LTD.
- 当前专利权人： SUMITOMO HEAVY INDUSTRIES, LTD.
- 当前专利权人地址： JP Tokyo
- 代理机构： Michael Best & Friedrich LLP
- 优先权： JP 18226435 2018.12.03
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; B23K26/354 ; H01L21/268 ; H01L21/66
摘要：
There is provided an annealing device including a heating unit that heats a surface of an annealing object to temporarily melt an outer layer portion, a sensor that detects thermal radiation light from the annealing object heated by the heating unit, and a processing unit that estimates an annealing result of the annealing object on the basis of a waveform showing a temporal change in an intensity of the thermal radiation light detected by the sensor.
公开/授权文献
- US20210287921A1 ANNEALING DEVICE AND ANNEALING METHOD 公开/授权日：2021-09-16
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