Invention Grant
- Patent Title: Template, workpiece, and alignment method
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Application No.: US17472387Application Date: 2021-09-10
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Publication No.: US12078922B2Publication Date: 2024-09-03
- Inventor: Takashi Sato , Takeshi Suto , Satoshi Mitsugi
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP 21049180 2021.03.23
- Main IPC: G03F1/42
- IPC: G03F1/42 ; G01B11/27 ; G03F7/00 ; G03F9/00 ; H01L23/544

Abstract:
A template of one embodiment includes an alignment mark. The alignment mark includes a first main pattern and a first auxiliary pattern. In the first main pattern, a first part and a second part are disposed according to a predetermined repeating pattern. The first auxiliary pattern is configured as a pattern opposite to the repeating pattern in a region outside an end of the first main pattern.
Public/Granted literature
- US20220308440A1 TEMPLATE, WORKPIECE, AND ALIGNMENT METHOD Public/Granted day:2022-09-29
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