A robot controlling part (41) of a substrate transferring robot performs an operation regulating control when a substrate is placed on a substrate placing part (12a). The operation regulating control is a control in which a hand (12) is moved in accordance with an operation plan that regulates the movement of the hand in a regulation target section (A) where the hand is moved to have a vertical acceleration component exceeding a given first threshold (L1), the movement of the hand including at least one of a horizontal velocity component exceeding a given second threshold (L2) and an acceleration component exceeding a given third threshold.