- 专利标题: Diamond coated antireflective window system and method
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申请号: US18310882申请日: 2023-05-02
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公开(公告)号: US12061313B2公开(公告)日: 2024-08-13
- 发明人: Adam Khan , Robert Polak
- 申请人: AKHAN Semiconductor, Inc.
- 申请人地址: US IL Gurnee
- 专利权人: AKHAN SEMICONDUCTOR, INC.
- 当前专利权人: AKHAN SEMICONDUCTOR, INC.
- 当前专利权人地址: US IL Gurnee
- 代理机构: Stevens Law Group
- 代理商 David R. Stevens
- 分案原申请号: US15447032 2017.03.01
- 主分类号: G02B1/115
- IPC分类号: G02B1/115 ; C23C14/06 ; C23C28/00
摘要:
A system and method for diamond based multilayer antireflective coating for optical windows are provided. An antireflective coatings for optical windows may include an optical grade silicon substrate, a first polycrystalline diamond film on the silicon substrate, a germanium film on the first polycrystalline diamond film, a fused silica film on the germanium film; and a second polycrystalline diamond film on the fused silica film. A method of fabricating a diamond based multilayer antireflective coating may include the steps of cleaning and seeding an optical substrate, forming a first diamond layer on the optical substrate, forming a germanium layer on the first diamond layer, forming a fused silica layer on the germanium layer, cleaning and seeding the germanium layer, and forming a second diamond layer on the germanium layer.
公开/授权文献
- US20230273346A1 Diamond Coated Antireflective Window System and Method 公开/授权日:2023-08-31
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