Invention Grant
- Patent Title: RF measurement from a transmission line sensor
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Application No.: US17737682Application Date: 2022-05-05
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Publication No.: US12061215B2Publication Date: 2024-08-13
- Inventor: David Coumou , Xiaopu Li , Michelle SanPedro
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: G01R19/00
- IPC: G01R19/00 ; G01R15/18 ; G01R19/165 ; G01R19/25

Abstract:
Embodiments disclosed herein include a sensor. In an embodiment, the sensor comprises a board, wherein an aperture is formed through the board, a current loop winding through the board around the aperture, and a voltage ring around the aperture and within an inner perimeter of the current loop, wherein the voltage ring comprises an interior ring, an insulator ring around the interior ring, and an exterior ring around the insulator ring.
Public/Granted literature
- US20230358790A1 RF MEASUREMENT FROM A TRANSMISSION LINE SENSOR Public/Granted day:2023-11-09
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