- 专利标题: Spatial light modulator and light-emitting device
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申请号: US17787976申请日: 2020-12-23
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公开(公告)号: US12051883B2公开(公告)日: 2024-07-30
- 发明人: Kazuyoshi Hirose , Yoshitaka Kurosaka , Soh Uenoyama
- 申请人: HAMAMATSU PHOTONICS K.K.
- 申请人地址: JP Hamamatsu
- 专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人地址: JP Hamamatsu
- 代理机构: Faegre Drinker Biddle & Reath LLP
- 优先权: JP 19238392 2019.12.27
- 国际申请: PCT/JP2020/048241 2020.12.23
- 国际公布: WO2021/132374A 2021.07.01
- 进入国家日期: 2022-06-22
- 主分类号: G02F1/015
- IPC分类号: G02F1/015 ; G02F1/025 ; H01S5/00 ; H01S5/026 ; H01S5/11 ; H01S5/185 ; H01S5/18
摘要:
This disclosure relates to a spatial light modulator, etc., the spatial light modulator being capable of dynamically controlling the phase distribution of light, and provided with a structure having a smaller pixel arrangement period and suitable for high-speed operation. The spatial light modulator includes a substrate. The substrate has a front surface, a back surface, and through-holes arranged one-dimensionally or two-dimensionally and penetrating between the front surface and the back surface. The spatial light modulator further includes layered structures each covering the inner walls of the through-holes. Each layered structure includes a first electroconductive layer on the inner wall, a dielectric layer on the first electroconductive layer and having optical transparency, and a second electroconductive layer on the dielectric layer and having optical transparency. At least one of the first and second electroconductive layers is electrically isolated for each group including one or more through-holes.
公开/授权文献
- US20230035423A1 SPATIAL LIGHT MODULATOR AND LIGHT-EMITTING DEVICE 公开/授权日:2023-02-02
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