Invention Grant
- Patent Title: Method of manufacturing semiconductor element that includes wet etching semiconductor layer that includes crystallized two-dimensional layers
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Application No.: US17244857Application Date: 2021-04-29
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Publication No.: US12022690B2Publication Date: 2024-06-25
- Inventor: Jun Hyung Lim , Hyungjun Kim , Hyungjun Kim , Young Jun Kim , Ju Sang Park , Whang Je Woo
- Applicant: Samsung Display Co., Ltd. , Industry-Academic Cooperation Foundation, Yonsei University
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co., Ltd.,Industry-Academic Cooperation Foundation, Yonsei University
- Current Assignee: Samsung Display Co., Ltd.,Industry-Academic Cooperation Foundation, Yonsei University
- Current Assignee Address: KR Yongin-si; KR Seoul
- Agency: Innovation Counsel LLP
- Priority: KR 20200052093 2020.04.29
- Main IPC: H10K59/121
- IPC: H10K59/121 ; H01L21/02 ; H01L27/12 ; H01L29/24 ; H01L29/66 ; H01L29/76 ; H01L29/786 ; H10K59/12 ; H10K71/00

Abstract:
A method may be used for manufacturing a semiconductor element. The method may include the following steps: preparing a substrate; forming a semiconductor layer on the substrate, wherein the semiconductor layer includes crystallized two-dimensional layers; forming a source electrode and a drain electrode on the semiconductor layer; forming an semiconductor member by wet etching the semiconductor layer using sodium hypochlorite as an etchant, wherein the wet etching results in a residue; and removing the residue using purified water and an inert gas.
Public/Granted literature
- US20210343817A1 METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT Public/Granted day:2021-11-04
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