- 专利标题： Power alarm and fire loading risk reduction for a deposition tool
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申请号： US17303987申请日： 2021-06-11
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公开(公告)号： US12020994B2公开(公告)日： 2024-06-25
- 发明人: Chih-Wei Chou , Yuan-Hsin Chi , Sheng-Yuan Lin , Yin-Tun Chou , Hung-Chih Wang , Yu-Chi Liu
- 申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址： TW Hsinchu
- 专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址： TW Hsinchu
- 代理机构： Harrity & Harrity, LLP
- 主分类号： H01L21/02
- IPC分类号： H01L21/02 ; H01L21/66 ; H01L21/67
摘要：
A deposition tool includes a power cable pedestal including a pedestal body with a first surface and a second surface and a guide hole that extends through the pedestal body from the first surface to the second surface, where at least a portion of a sidewall of the guide hole has a slanted surface, and where the pedestal body is formed from a first material with a melting point that is higher than a melting point of Polyoxymethylene (POM). The deposition tool includes a bushing arranged over the guide hole, where the bushing is formed from a second material with a melting point that is higher than the melting point of POM.
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