- 专利标题: Insulator for an ion implantation source
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申请号: US16947430申请日: 2020-07-31
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公开(公告)号: US12020896B2公开(公告)日: 2024-06-25
- 发明人: Tsung-Min Lin , Sheng-Chi Lin , Jui-Feng Jao , Fang-Chi Chien , Lung-Yin Tang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Harrity & Harrity, LLP
- 主分类号: H01J37/317
- IPC分类号: H01J37/317 ; H01J37/08
摘要:
An insulator for an ion implantation source may provide electrical insulation between high voltage components and relatively lower voltage components of the ion implantation source. To reduce the likelihood of and/or prevent a leakage path forming along the insulator, the insulator may include an internal cavity having a back and forth pattern. The back and forth pattern of the internal cavity increases the mean free path of gas molecules in the ion implantation source and increases the surface area of the insulator that is not directly or outwardly exposed to the gas molecules. This results in a continuous film or coating being more difficult and/or less likely to form along the insulator, which extends the working time of the ion implantation source.
公开/授权文献
- US20220037115A1 INSULATOR FOR AN ION IMPLANTATION SOURCE 公开/授权日:2022-02-03
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