- 专利标题: High-frequency power supply device and output control method therefor
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申请号: US17911174申请日: 2021-03-04
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公开(公告)号: US12014899B2公开(公告)日: 2024-06-18
- 发明人: Takeshi Fujiwara , Yuya Yasuda , Ryuhei Katafuchi , Hiroyuki Kojima
- 申请人: KYOSAN ELECTRIC MFG. CO., LTD.
- 申请人地址: JP Yokohama
- 专利权人: KYOSAN ELECTRIC MFG. CO., LTD.
- 当前专利权人: KYOSAN ELECTRIC MFG. CO., LTD.
- 当前专利权人地址: JP Yokohama
- 代理机构: WHDA, LLP
- 优先权: JP 20045557 2020.03.16
- 国际申请: PCT/JP2021/008459 2021.03.04
- 国际公布: WO2021/187137A 2021.09.23
- 进入国家日期: 2022-09-13
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A high-frequency power supply device, which outputs high-frequency pulses to a target device on the basis of a synchronous pulse and a clock pulse, and the output control method therefor are such that a period reference signal is generated from output timing information pertaining to the synchronous pulse, an output level signal is generated from output level information, an output stop time is timed on the basis of the period reference signal and an output stop signal is generated, and, when the period reference signal, the output level signal, and the clock pulse are received and a high-frequency pulse is formed on the basis of these signals, transmission of the output level signal is stopped while the output stop signal is being received.
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