- 专利标题: Bias supply control and data processing
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申请号: US18141448申请日: 2023-04-30
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公开(公告)号: US12009179B2公开(公告)日: 2024-06-11
- 发明人: Hien Minh Nguyen
- 申请人: Advanced Energy Industries, Inc.
- 申请人地址: US CO Fort Collins
- 专利权人: Advanced Energy Industries, Inc.
- 当前专利权人: Advanced Energy Industries, Inc.
- 当前专利权人地址: US CO Denver
- 代理机构: Neugeboren O'Dowd PC
- 主分类号: H02M3/155
- IPC分类号: H02M3/155 ; H01J37/32
摘要:
Bias supplies and plasma processing systems are disclosed. One bias supply comprises an output node, a return node, and a switch network and at least one power supply coupled to the output node and the return node. The switch network and the at least one power supply configured, in combination, to apply an asymmetric periodic voltage waveform and provide a corresponding current waveform at the output node relative to the return node.
公开/授权文献
- US20230343556A1 BIAS SUPPLY CONTROL AND DATA PROCESSING 公开/授权日:2023-10-26
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