Invention Grant
- Patent Title: Fluidic device, system, and mixing method
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Application No.: US17256151Application Date: 2018-06-29
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Publication No.: US11982602B2Publication Date: 2024-05-14
- Inventor: Ryo Kobayashi , Hirofumi Shiono
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Squire Patton Boggs (US) LLP
- International Application: PCT/JP2018/024945 2018.06.29
- International Announcement: WO2020/003538A 2020.01.02
- Date entered country: 2021-07-19
- Main IPC: G01N1/38
- IPC: G01N1/38 ; B01F33/301 ; G01N35/08

Abstract:
The present invention provides a fluidic device in which solutions of different concentrations can be easily obtained. The fluidic device includes: a first substrate and a second substrate which are stacked in a thickness direction; an undiluted solution introduction flow path which has an undiluted solution introduction port and which is constituted of a groove part provided on at least one of the first substrate and the second substrate; a first circulation flow path which is constituted of a groove part having an annular shape and having a shared part that shares part of a flow path with the undiluted solution introduction flow path and a non-shared part which is not shared with the undiluted solution introduction flow path and which is connected to a diluting solution introduction port; a second circulation flow path which is provided independently of the first circulation flow path and which is constituted of a groove part having an annular shape and having a shared part that shares some flow path with the undiluted solution introduction flow path and a non-shared part which is not shared with the undiluted solution introduction flow path and which is connected to a diluting solution introduction port; and/or a third circulation flow path which is constituted of a groove part having an annular shape and having a shared flow path that shares part of a flow path with the first circulation flow path and a non-shared flow path which is not shared with the first circulation flow path and which is connected to a diluting solution introduction port, wherein the undiluted solution introduction flow path includes a valve at both ends of the shared part.
Public/Granted literature
- US20210348992A1 FLUIDIC DEVICE, SYSTEM, AND MIXING METHOD Public/Granted day:2021-11-11
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