- 专利标题: Complementary switch element
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申请号: US17418104申请日: 2019-12-25
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公开(公告)号: US11972985B2公开(公告)日: 2024-04-30
- 发明人: Katsuhiro Tomioka
- 申请人: NATIONAL UNIVERSITY CORPORATION HOKKAIDO UNIVERSITY
- 申请人地址: JP Hokkaido
- 专利权人: NATIONAL UNIVERSITY CORPORATION HOKKAIDO UNIVERSITY
- 当前专利权人: NATIONAL UNIVERSITY CORPORATION HOKKAIDO UNIVERSITY
- 当前专利权人地址: JP Hokkaido
- 代理机构: Calfee, Halter & Griswold LLP
- 优先权: JP 18247228 2018.12.28
- 国际申请: PCT/JP2019/050823 2019.12.25
- 国际公布: WO2020/138168A 2020.07.02
- 进入国家日期: 2021-06-24
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L21/8234 ; H01L21/8238 ; H01L29/808 ; B82Y10/00
摘要:
This complementary switch element includes: a first TFET having a first conductive channel; and a second TFET having a second conductive channel. Each of the first TFET and the second TFET includes: a group IV semiconductor substrate doped in a first conductive type; a nanowire which is formed of a group III-V compound semiconductor and is disposed on the group IV semiconductor substrate; a first electrode connected to the group IV semiconductor substrate; a second electrode connected to the nanowire; and a gate electrode. The nanowire includes a first area connected to the group IV semiconductor substrate and a second area doped in a second conductive type. In the first TFET, the second electrode is a source electrode, and the first electrode is a drain electrode. In the second TFET, the first electrode is a source electrode, and the second electrode is a drain electrode.
公开/授权文献
- US20220084891A1 COMPLEMENTARY SWITCH ELEMENT 公开/授权日:2022-03-17
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