Invention Grant
- Patent Title: Method for forming metal film
-
Application No.: US17807935Application Date: 2022-06-21
-
Publication No.: US11932957B2Publication Date: 2024-03-19
- Inventor: Haruki Kondoh
- Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Toyota
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Toyota
- Agency: Dickinson Wright, PLLC
- Priority: JP 21103471 2021.06.22
- Main IPC: C25D21/10
- IPC: C25D21/10 ; C25D17/06 ; C25D17/10

Abstract:
Provided is a method for forming a metal film using a solid-state electrolyte membrane, and the method allows a metal film having a smooth surface to be formed and an additive to sufficiently serve its function. A method for forming a metal film includes the successive steps of (a) supplying a solution to a solution-housing space, the solution containing ions of the metal and an additive; (b) increasing a pressure of the solution in the solution-housing space in a state where the solution-housing space is uncommunicated with a solution tank and the substrate held by a holder is in contact with the solid-state electrolyte membrane; (c) decreasing the pressure of the solution in the solution-housing space; and (d) forming the film of the metal on the substrate by applying a voltage between an anode and the substrate while the solution is circulated between the solution-housing space and the solution tank.
Public/Granted literature
- US20220403544A1 METHOD FOR FORMING METAL FILM Public/Granted day:2022-12-22
Information query