Optical inspection method, non-transitory storage medium storing optical inspection program, and optical inspection apparatus
摘要:
According to the embodiment, an optical inspection method includes: emitting, acquiring, and comparing. The emitting includes emitting light beams having a first wavelength and a second wavelength toward an imaging unit in accordance with light beam directions from a subject, with light beam intensities of the first wavelength and the second wavelength being in a complementary relationship. The acquiring includes acquiring each of information of a first image related to the first wavelength and information of a second image related to the second wavelength with the imaging unit. The comparing includes comparing the information of the first image and the information of the second image to extract unevenness information of the subject.
信息查询
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