- 专利标题: Optical inspection method, non-transitory storage medium storing optical inspection program, and optical inspection apparatus
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申请号: US17681396申请日: 2022-02-25
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公开(公告)号: US11906439B2公开(公告)日: 2024-02-20
- 发明人: Hiroya Kano , Hiroshi Ohno
- 申请人: KABUSHIKI KAISHA TOSHIBA , TOSHIBA DIGITAL SOLUTIONS CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: Kaushiki Kaisha Toshiba,Toshiba Digital Solutions Corporation
- 当前专利权人: Kaushiki Kaisha Toshiba,Toshiba Digital Solutions Corporation
- 当前专利权人地址: JP Tokyo; JP Kawasaki
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- 优先权: JP 21136474 2021.08.24
- 主分类号: G01N21/88
- IPC分类号: G01N21/88
摘要:
According to the embodiment, an optical inspection method includes: emitting, acquiring, and comparing. The emitting includes emitting light beams having a first wavelength and a second wavelength toward an imaging unit in accordance with light beam directions from a subject, with light beam intensities of the first wavelength and the second wavelength being in a complementary relationship. The acquiring includes acquiring each of information of a first image related to the first wavelength and information of a second image related to the second wavelength with the imaging unit. The comparing includes comparing the information of the first image and the information of the second image to extract unevenness information of the subject.
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