Invention Grant
- Patent Title: Stress sensor, structural health monitoring system for constructions and process for manufacturing a stress sensor
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Application No.: US17562829Application Date: 2021-12-27
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Publication No.: US11898943B2Publication Date: 2024-02-13
- Inventor: Santo Alessandro Smerzi
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.L.
- Current Assignee: STMICROELECTRONICS S.r.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT 2018000003693 2018.03.16
- Main IPC: G01M5/00
- IPC: G01M5/00 ; G01L1/18 ; G01L5/162

Abstract:
A stress sensor includes: a substrate, having a face and a recess, open to the face; and a sensor chip of semiconductor material, housed in the recess and bonded to the substrate, the sensor chip being provided with a plurality of sensing components of piezoresistive material. The substrate has a thickness which is less by at least one order of magnitude with respect to a main dimension of the face. Further, the sensor chip has a thickness which is less by at least one order of magnitude with respect to the thickness of the substrate, and a Young's module of the substrate and a Young's module of the sensor chip are of the same order of magnitude.
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