- 专利标题: Plasma processing apparatus
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申请号: US17503611申请日: 2021-10-18
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公开(公告)号: US11881380B2公开(公告)日: 2024-01-23
- 发明人: Toshihiro Wada , Naoaki Takeda
- 申请人: Panasonic Intellectual Property Management Co., Ltd.
- 申请人地址: JP Osaka
- 专利权人: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- 当前专利权人: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- 当前专利权人地址: JP Osaka
- 代理机构: PEARNE & GORDON LLP
- 优先权: JP 20176349 2020.10.20
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A plasma processing apparatus 100 including: a chamber 101 having a dielectric window; a coil 102 placed outside the chamber so as to face the dielectric window; a FS electrode 103 having a plate shape and placed on the chamber side of the coil; a first power source 104 for supplying a high-frequency power of a first frequency to the coil 102; a second power source 105 for supplying a high-frequency power of a second frequency which is different from the first frequency, to the FS electrode 103; a first matcher 106 placed between the first power source and the coil; a second matcher 107 placed between the second power source and the FS electrode; and a first frequency attenuation filter connected between the second matcher and the FS electrode, and configured to allow transmission of the high-frequency power of the second frequency and inhibit transmission of the high-frequency power of the first frequency.
公开/授权文献
- US20220122809A1 PLASMA PROCESSING APPARATUS 公开/授权日:2022-04-21
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